MEMS Demodulator Based on Electrostatic Actuator

This thesis provides analysis and modeling for one of the Micro-Eletro-Mechanical System (MEMS) electrostatic actuator that consists of a micro-plate at the end of a cantilever beam, and introduces different type of MEMS electrostatic actuator; a paddle structure, which is a micro-plate suspended by two cantilever beams on each side. An electrode plate is placed right under the micro-plate to apply an actuation voltage. A step-by-step analysis explains how to obtain each parameter used for the simulations. Static and dynamic models are presented with governing equations for the paddle-shaped MEMS electrostatic actuator. The key findings are that the proposed electrostatic MEMS demodulator architecture taking advantage of the resonance circuit principle not only theoretically work in analytical model, and numerical simulations, but also work in real life. For the Amplitude Modulations (AM) demodulations, simulations with various damping factors are provided, and experimental data are discussed. By measuring the displacement using the phase detector circuit and vibrometer, as a proof of versatility of the demodulation architecture based on the MEMS electrostatic actuator, the results from Frequency Modulations (FM), Amplitude Shift Keying (ASK), and Frequency Shift Keying (FSK) demodulation scheme experiments that are conducted with the physically identical dimensions and configuration are provided. The future plan for further analysis and experiment is discussed at the end